GR-M Micro-Probe Linear Encoder
±5 mm micro-travel measurement with 0.1 μm resolution for gauges, metrol…
0.1 μm resolution and ±3 μm/m accuracy for precision grinders, optics and semiconductor equipment.
0.1 μm resolution and ±3 μm/m accuracy for precision grinders, optics and semiconductor equipment.
| Measuring range | 50 ~ 1500 mm |
|---|---|
| Grating pitch | 4 μm |
| Resolution | 0.1 μm |
| System accuracy | ±3 μm/m |
| Output | 1 Vpp / TTL |
| Protection | IP53 |
| Operating temp. | 0 ~ +50 ℃ |
| Scale body | 硬质玻璃 + 铝底座 |
GR-H uses a hard glass substrate with a 4 μm chrome grating of low thermal expansion; mounted on a low-expansion base it holds accuracy through temperature swings.
Outputs are 1 Vpp sine or highly interpolated TTL, reaching 0.01 μm display resolution with an interpolator — enough for precision grinding and optical machining closed loops.
±5 mm micro-travel measurement with 0.1 μm resolution for gauges, metrol…
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